Si-Based Capacitors Achieve Density of 1F/mm2

Abstract: This application note introduces new Si-based, SlimCap trench capacitors. We will show how these capacitors have very small voltage and temperature coefficients (< 0.5%/V and < 0.05%/0C, respectively) and produce no acoustic noise. Furthermore, these Si-based capacitors can be thinned down to 80µm without degrading their properties; they can be arranged into arrays of multiple capacitors on a single chip, with a superior capacitance matching (within ±0.5%), and thus reduce the Bill of Materials (BOM). We will show how the small factor of the capacitors is beneficial for embedding them into package substrates close to an active chip to provide low-parasitics signal filtering.